Is it possible taht TMAH can permeate ITO and Mo then etch Al?
- From: brucetseng1015@xxxxxxxxx
- Date: 16 Mar 2007 18:19:24 -0700
Is it possible taht TMAH can permeate ITO and Mo then etch Al?
In my opnion, ITO is porous materail, but I'm not sure about Mo....
In this issue, the top layer is a-ITO, the second layer is Mo, then
the bottom layer is Al.
Something strange happens! With SEM check, Al is etched, but ITO and
Mo are not.
I doubt that developer (TMAH) permeate ITO and MO then etch Al...
Is taht possible?
.
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