Al2O3 patterning

From: Nima (izadinima_at_yahoo.com)
Date: 10/17/04

  • Next message: Uncle Al: "Re: Al2O3 patterning" 
    Date: 17 Oct 2004 04:03:09 -0700

    Hi,
    Now I know that we can etch alumina in too high temperature and
    pressure like 10000 psi in NaOH, KOH, NaCl, etc. and there is one
    report of etching it in phosphoric acid in 350°C -search
    "Micromachining of fine ceramics by photolitography" in Sensor and
    Actuator- but all of these is too harsh condition and cannot easily
    perform.

    Dear Uncle Al
    porous alumina os a very intresting material with its high etchablity
    but converting it to alumina is a hard work to do.
    I cannot understand your means of "/_\H" ... what is this?

    Thanks a lot
    Nima

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