Re: Al2O3 patterning

From: Uncle Al (UncleAl0_at_hate.spam.net)
Date: 10/17/04 

Date: Sun, 17 Oct 2004 12:25:53 -0700

Nima wrote:
>
> Hi,
> Now I know that we can etch alumina in too high temperature and
> pressure like 10000 psi in NaOH, KOH, NaCl, etc. and there is one
> report of etching it in phosphoric acid in 350°C -search
> "Micromachining of fine ceramics by photolitography" in Sensor and
> Actuator- but all of these is too harsh condition and cannot easily
> perform.
>
> Dear Uncle Al
> porous alumina os a very intresting material with its high etchablity
> but converting it to alumina is a hard work to do.
> I cannot understand your means of "/_\H" ... what is this?

Enthalpy of formation. Spontaenous reactions go downhill. 

-- 
Uncle Al
http://www.mazepath.com/uncleal/
 (Toxic URL! Unsafe for children and most mammals)
http://www.mazepath.com/uncleal/qz.pdf

Relevant Pages

  • Al2O3 patterning
    ... Now I know that we can etch alumina in too high temperature and ... pressure like 10000 psi in NaOH, KOH, NaCl, etc. and there is one ... report of etching it in phosphoric acid in 350°C -search ... porous alumina os a very intresting material with its high etchablity ...
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