Re: Black Chrome

From: Phil Hobbs (pcdh_at_SpamMeSenseless.us.ibm.com)
Date: 11/21/04 

Date: Sat, 20 Nov 2004 19:56:16 -0500

Mark Thorson wrote:

>>I need a process for putting down a few thousand angstroms of
>>black chrome in a DC sputtering system. Have any of the
>>assembled multitude done this?
>>
>>
>
>Isn't black chrome a mixture of chrome and chrome oxides,
>normally deposited by plating?
>
>
Yes, but it's also deposited by sputtering, which is what I need to do.
If I dunk my wafers in a plating bath, they'll *never* be allowed back
in the fab.

Cheers,

Phil Hobbs