Re: ion beam etching of TiO2



In article <1119604016.545220.155800@xxxxxxxxxxxxxxxxxxxxxxxxxxxx>,
"schmu" <schmu666@xxxxxxxxxxx> wrote:

> Hi,
>
> is it possible that the insulating TiO2 becomes conductive after it has
> been etched with an Argon ion beam (~500eV)?
> Maybe the oxygen-atoms are removed by the ion bombardment and metallic
> Ti remains???
>
> Bye and thanks
>
> Schmu

You should check under an optical microscope if you see any blue colour.

J.J.
.



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