Re: ion beam etching of TiO2
- From: "schmu" <schmu666@xxxxxxxxxxx>
- Date: 24 Jun 2005 11:24:47 -0700
The raw TiO2 Substrate has a resistivity of >2 GOhm (GigaOhm). After
removing the conductive film (resistivity ~100Ohm before sputtering)
the resistivity of the substrate is about 70kOhm.
.
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- ion beam etching of TiO2
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- ion beam etching of TiO2
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