Re: CVD thick teflon


Mark Thorson a écrit :
slibon@xxxxxxxxx wrote:

Hello,
I am looking for a process to deposit a thick (50µm and more)
conformal coating of teflon (or any other high temp polymer) on a
polyimide substrate. The process should not raise the temperature of
the substrate above 100°C. CVD and PECVD is used for low-k teflon on
wafers but these guys work on thin films (below the µm). Any
sources...??

You dissolve Teflon powder in Fluorinert, coat,
then bake off the Fluorinert. Several of the
attempts to make substrates for moving droplets
around (for microchemistry) have used this
approach to make a hydrophobic surface.

There are several different Fluorinerts.
You'll probably need the lightest one to stay
below 100C.
I thought of that (did not tried though) but would the coating be non-
porous. I guess I still will have some kind of powder dispertion?
Porosity/pinhole would kill the dielectric strength. Can you confirm/
deny? Thanks anyway

.

Relevant Pages

  • Re: CVD thick teflon
    ... polyimide substrate. ... CVD and PECVD is used for low-k teflon on ... You dissolve Teflon powder in Fluorinert, coat, ...
    (sci.materials)
  • Re: CVD thick teflon
    ... polyimide substrate. ... CVD and PECVD is used for low-k teflon on ... You dissolve Teflon powder in Fluorinert, coat, ...
    (sci.materials)
  • Re: CVD thick teflon
    ... polyimide substrate. ... CVD and PECVD is used for low-k teflon on ... Porosity/pinhole would kill the dielectric strength. ...
    (sci.materials)
Loading