Re: Microfluidics - Glass Raw materials
From: Arthur Beyder (beyder_at_buffalo.edu)
Date: 06/09/04
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Date: 9 Jun 2004 14:20:38 GMT
Darren Rhodes wrote:
> Were would I be able to obtain some glass coated with photoresist and
> chromium for photolithography and subsequent etching? Does anyone have a
> list of companies that provides this raw material? Does anyone have a
> handle on the cost of the blanks? Does anyone know of any companies that
> will do the etching? Darren.
>
>
>
>
For the samples, try virginia semiconductor or university wafers.
For deposition and etching
Try http://www.mems-exchange.org/exchange/tour/catalog.html
We've never used it, but they are supposed to have a bunch of processes
available to the outside users.
Hope this helps,
Art
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