TLA 20 ion beam etcher maunal

From: Xiaoyong_Liu (Xiaoyong_Liu_at_brown.edu)
Date: 12/10/04 

Date: 10 Dec 2004 22:43:56 GMT

Dear All,
    we do have a Technics MIM TLA 20 ion beam etching system here. But there
is no manual with it? would anyone have the manual of this system/ I would
appreciate if you can send me one or at least tell me where I can get it.

Thanks

Xiaoyong
m