SEM question/advice, best FE SEM?

From: Dev Null (devnull_at_foo.bar)
Date: 09/28/04 

Date: 28 Sep 2004 02:30:45 GMT

Hello,

My company wants to buy a high resolution SEM. I've looked briefly
at Zeiss, Hitachi, and JEOL.

I've been told that FE is the way to go but cold FE isn't worth the
trouble.

We will be looking at a wide variety of samples, especially
photoresist on silicon wafers.

I've used a JEOL-35C and a Hitachi 3500H.

I would appreciate any suggestions on manufacturers or models.

Thanks

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