Re: SEM question/advice, best FE SEM?
From: Kevin Cunningham (smskjd_at_mindspring.com)
Date: 09/28/04
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Date: 28 Sep 2004 16:31:17 GMT
SEM is not my forte but (the famous "but") the manufacturer might be less
important than the service. I would ask who in your neighborhood has the
best service, both price and techs?
Kevin
"Dev Null" <devnull@foo.bar> wrote in message
news:cjaicl0ia8@enews3.newsguy.com...
>
> Hello,
>
> My company wants to buy a high resolution SEM. I've looked briefly
> at Zeiss, Hitachi, and JEOL.
>
> I've been told that FE is the way to go but cold FE isn't worth the
> trouble.
>
> We will be looking at a wide variety of samples, especially
> photoresist on silicon wafers.
>
> I've used a JEOL-35C and a Hitachi 3500H.
>
> I would appreciate any suggestions on manufacturers or models.
>
> Thanks
>
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