Re: Dark rectangular area in SEM
wilf_at_ltic.moc
Date: 10/12/04
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Date: Tue, 12 Oct 2004 15:56:14 GMT
I do wish people would read up about the machines they are using. Its
contamination.
Unless you are using a super clean UHV machine,you will have oil in your
vacuum system
this is burnt onto the sample by electron beam. it has been reported for
nearly 40 years now
ever since the first SEMs a simple scan of literature would give you the
answer.
Electron damage only takes place when samples are very susceptable and the
beam current is very high as it usually due to local heating effects.
you will find it almost impossible to remove without repolishing.
"Yung-Jen Lin" <yjlin@ttu.edu.tw> wrote in message
news:53e9c34.0410120728.55f0ea0b@posting.google.com...
> Hello, everyone,
> when I wanted to take SEM pictures of a Au-coated ceramic surface, I
> often encounter one problem. I used a higher magnification image to
> get a better focus. When I turned down to the desired (lower)
> magnification, I usually found a rectangular dark area, which was the
> scanning area of higher magnification. People suggested me to take
> pictures of the nearby area.
> My question is: what causes such a darken area after scanning of
> e-beam? Some said it was caused by the contamination of the sample
> surface. Others said it was caused by the defects of ceramics due to
> high energy electron bombardment. Which one is correct? Or, what is
> the real reason for it?
> Thanks in advance.
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