Re: SEM FAQ and/or links
From: Gary G (see.signature_at_bottom)
Date: 03/07/05
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Date: Mon, 07 Mar 2005 13:06:27 -0800
On Sun, 27 Feb 2005 14:33:34 -0600, Richard Owlett
<rowlett@atlascomm.net> wrote:
>I saw a thread on another group about scanning electron microscopes.
>It raised "how is it implemented type questions?"
>
>A Google wasn't productive as I got back results results which were
>aimed at "theory of operation" rather than "practice of operation" so to
>speak. Or, at the other extreme, were engineering/purchase specs of one
>manufacturer's components.
>
>Typical of the style of question I have in mind is:
>"Mechanically, how is sample manipulated to scan various portions of it."
>
>I figured a FAQ or organized list of links would get me pointed in
>productive directions. Unfortunately I do not have access to a academic
>library to browse. [ I'm in *rural* SW Missouri ]
>
>Thank you
The sample is either mechanically moved using the SEM stage or the
beam scan area is electronically moved. Or, one can do both methods.
The ability to move the specimen mechanically is determined by the set
of features that are inherent to a specific stage design. e.g., x, y,
z, r and t. Some may do just x & y while others may do x, y and r or
combinations. The more sophisticated stages are 5 and 6 axis and are
eucentric. These stages are motorized. There are multi-axis stages
that are manually manipulated.
Hope this answers your question.
Gary Gaugler, Ph.D.
Microtechnics, Inc.
Granite Bay, CA 95746
916.791.8191
gary@microtechnics dot com
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