SEM of magetic materials

vsoares_at_inesc-mn.pt
Date: 03/11/05


Date: 11 Mar 2005 02:57:15 -0800

Hi all,

I'm not a SEM especialist but have often to use the SEM at work.We have
a S2500 Hitachi tungsten filament scope and we have sometimes to look
at magnetic sensors.One of the problems is that the sensor is on top of
SiO2 so I cannot get enough contrast.
Is there some etchant I could use to increase the contrast?What worries
me is that the sensor is only circa 200 A high and that any etch will
destroy it.

Thank you in advance

Virginia Soares