Re: Does electron beam hit vertically in SEM at all the sample points
- From: Kevin Cunningham <smskjc@xxxxxxxxxxxxxx>
- Date: Fri, 10 Oct 2008 07:51:49 -0700 (PDT)
On Oct 9, 7:59 pm, nutannathsha...@xxxxxxxxx wrote:
Hey Kevin,
Thank you very much for the reply. I was wondering what the maximum
angle of incidence for electron beam is in typical SEMs.
Nutan
On Oct 2, 6:41 am, Kevin Cunningham <sms...@xxxxxxxxxxxxxx> wrote:
Nutan,
What you discussing is Abbe Error. EM's have some Abbe Error however
the amount is quite small so with all the other problems in EM Abbe
Error is quite small.
Thanks,
Kevin Cunningham
SMS
I'd think you'd figure that out as Abbe did for the NA equation. The
beam start point doesn't move so I guess the beam shift would be
related to the outer beam distance to center, say sine (theta). The
angle is at least right so I'm some were close to accurate.
Thanks,
Kevin Cunningham
SMS
.
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